Operation modes : Contact mode, friction mode, extended modes of tapping phase, MFM, EFM, scans at random angle
Scan angle : Random angle
Maximum scan range : X/Y axis: 20 µm, Z axis: 2 µm
Optical system/ Magnification of CCD : Magnification: 4x, Resolution: 2.5 µm
Operation modes : Contact mode, friction mode, extended modes of tapping phase, MFM, EFM, scan angle 0 to 360°
Scan angle : 0 to 360°
Maximum scan range : X/Y axis: 50 µm, Z axis: 5 µm
Optical system/ Magnification of CCD : Magnification: 10x, Resolution: 1 µm