Scanning Electron Microscope LSEM-A10
Magnification : 1 x to 2,500,000 x
Resolution : 1.0 nm at 15 kV (SE), 1.5 nm at 1 kV (SE), 0.8 nm at 30 kV (STEM)
Voltage : 20 V to 30 kV
Electron Gun : Schottky Field Emission Electron Gun, In-cylinder Deceleration, Electromagnetic Composite Objective, Water-cooled Thermostatic Objective