info@labtron.com
| Service Condition | Ambient temperature: 5 to 40℃ |
| Source | Three-phase 380V |
| Water Gage | <2.5bar |
| Plated Layer Monitoring | SQM160 membrane thickness monitor Coating inhomogeneity <6% |
| Heat Lamp | Four halogen heating lamps for degassing One neon lamp for lighting |
| Electrode Interface | 2-way metal evaporation electrode interface, backup included |
| Water Cooling System | Water pressure monitoring |
| Observation Window | X-ray filter glass Diameter: 100mm |
| Control System | Touch screen system |
| Electron Gun | New electronic gun with 6-hole crucible |
| Sample Turntable | Sample size: <150mm Rotation capability Adjustable distance: 200mm to 250 mm Heating up to <500℃ |
| System Vacuum Degree | Limit Vacuum: <5x10⁻⁵ Pa after 12 to 24 hours of baking and continuous pumping Extraction Rate: Vacuum <5x10⁻⁴ Pa in 40 minutes; from atmosphere to 4 Pa System Leakage Rate: Vacuum <10 Pa after 12 hours of shutdown |
| Vacuum Unit | FB1200 Molecular pump + VRD-16 front stage pump + side extraction valve + gate valve + cut-off valve + composite vacuum meter + coating monitoring vacuum meter interface (standby) |
| Power Consumption | <20 kW |
| Power Supply | 220V 50HZ |
| Dimension | 1000 × 800 × 1500 mm |
| Weight | 710 Kg |
Download catalog for
E-Beam Evaporator LEBE-A10 Catalog
E-Beam Evaporator features an electron beam gun with variable power, ensuring precise control of evaporation rate and layer uniformity. They operate within an ultra-high vacuum chamber for a clean deposition environment, producing high-purity films. An advanced coating thickness monitor is present for real-time film thickness monitoring. They support a wide range of materials, including metals, dielectrics, and semiconductors. Our e-beam evaporator are integrated with safety features to protect both the operator and the instrument.
Labtron Equipment Ltd., Quatro House, Lyon Way, Camberley, Surrey GU16 7ER United Kingdom
Email: info@labtron.com Whatsapp: +44 73 4441 2688 Phone: +44 2080 043608