Magnetron Coating Machine LMMC-A13 has a sample stage of Ф 150 mm which can rotate up to a speed of 20 rpm. It features two magnetron targets and DC power supplies. The system is equipped with advanced cooling for the magnetron and molecular pumps. Its dual chambers: a main chamber and a transition chamber allows for sputtering and loading samples without disrupting the vacuum. This design reduces the number of vacuum cycles, saving time.
| Sample Stage Size | Ф 150 mm |
| Sample Stage Rotating Speed | 1 to 20 rpm adjustable |
| Sample Stage Heating Temperature | ≤ 500℃ |
| Temperature Control Accuracy | ± 1℃ |
| Magnetron Sputtering Head Diameter | Ф 50.8 mm |
| Magnetron Sputtering Head Thickness | ≤ 3 mm |
| Magnetron Sputtering Head Cooling Mode | Circulating water cooling |
| Magnetron Sputtering Head Water Flow Rate | ≥ 10 L/min |
| Vacuum Chamber Size | Ф 325 × 500 mm |
| Vacuum Chamber Transition Cavity | Ф 150 × 150 mm |
| Vacuum Chamber Material | 304 SUS |
| Vacuum Chamber Opening Mode | Top opening |
| Vacuum System | Molecular pump system |
| Molecular Pump Pumping Rate | 600 L/s |
| Vacuum System Pressure | ≤ 5 × 10-4 Pa |
| Gas Control | One channel |
| Gas Type | Argon |
| Flow Rate | 200 sccm |
| Film Thickness Meter | Quartz Crystal |
| Resolution | 0.10 Å |
| Sputter Power Supply | DC 500 W |
| Target Power Supply Quantity | 1 |
| Overall Power Supply | AC 220V, 50Hz |
| Total Power | 6.5 kW |
| Dimension | 1090 × 900 × 1250 mm |
| Packing Dimension 1 | 1220 × 1000 × 1520 mm |
| Packing Dimension 2 | 800 × 620 × 615 mm |
| Net Weight | 395 kg |
| Gross Weight 1 | 384 kg |
| Gross Weight 2 | 74 kg |
Dual vacuum chambers
Automatic current and vacuum shut-off protections
Independent vacuum systems for each chamber
High sputtering power
Stainless steel construction for durability
Magnetron Coating Machine LMMC-A13 is used in fields such as material science, semiconductor manufacturing, and thin film technology. It is ideal for applications requiring precise multilayer coating of conductive metal films, such as in electronics, solar cells etc.
Labtron Equipment Ltd., Quatro House, Lyon Way, Camberley, Surrey GU16 7ER United Kingdom
Email: info@labtron.com Whatsapp: +44 73 4441 2688 Phone: +44 2080 043608
info@labtron.com
