Plasma Sputtering Coater LPSC-A10 ensures uniform coating with a 100 mm rotatable sample stage and an adjustable rotation speed of 1rpm to 20 rpm. It features a PLC touch screen interface, offering a user-friendly operation. The low temperature plasma process prevents thermal damage for sensitive samples. Its two-staged sputtering method increases its efficiency to deposit thin metal layers. Our coater provides precise coatings with low thermal effect.
| Sample Stage Size | 100 mm |
| Sample Stage Rotating Speed | 1 to 20 rpm adjustable |
| Sample Stage To Target Surface Distance | 20 to 25 mm height (adjustable) |
| Plasma Sputtering Source Quantity | 2 inches x 1 target |
| Plasma Sputtering Source Cooling Method | Natural cooling |
| Vacuum Chamber Size | Ф 180 × 150 mm |
| Vacuum Chamber Observation Window | Omnidirectional visibility |
| Vacuum Chamber Material | High purity quartz |
| Vacuum Chamber Open Method | Top cover removable |
| Vacuum Chamber Cover Material (Upper And Lower) | 304 SUS |
| Vacuum Chamber Pumping Port | KF25 |
| Vacuum Chamber Intake Port | 1/4 inch ferrule connector |
| Vacuum System Pump Type | Dual-stage rotary vane vacuum pump |
| Vacuum System Pumping Rate | 1.1 L/s (4 m³/h) |
| Vacuum System Ultimate Vacuum Pressure | ≥ 0.1 Pa |
| Vacuum System Vacuum Measurement | Resistance vacuum gauge |
| Vacuum System Pumping Port | KF25 |
| Vacuum System Exhaust Interface | KF16 |
| Plasma Sputtering Power Supply | 3000 V, DC |
| Output Power of DC Power Supply | ≤ 150 W |
| Maximum Sputtering Current | 0.05 A |
| Power Supply | AC 220 V, 50 Hz |
| Total Power | 1.5 kW/ 2 kW |
| Dimension | 550 × 450 × 450 mm |
| Weight | 30 kg |
High-purity quartz vacuum chamber
Dual-staged rotary vane vacuum pump
Compact size
Easy operation
Plasma Sputtering Coater LPSC-A10 is used in materials science, nanotechnology, electronics, semiconductor research, and sample preparation for electron microscopy.
Labtron Equipment Ltd., Quatro House, Lyon Way, Camberley, Surrey GU16 7ER United Kingdom
Email: info@labtron.com Whatsapp: +44 73 4441 2688 Phone: +44 2080 043608
info@labtron.com
