Plasma Sputtering Coater LPSC-A11 supports samples with a diameter of up to 100 mm. It incorporates a heating sample stage for which the temperature can reach up to 500℃ for better adhesion. The temperature is precisely controlled with PID control ensuring an accuracy of ± 1℃. Its water cooling system prevents overheating during extended sessions. Our coater is ideal for precise and demanding sputtering processes.
| Sample Stage Size | 100 mm |
| Sample Stage Rotating Speed | 1 to 20 rpm adjustable |
| Sample Stage Heating Temperature | ≤ 500℃ |
| Sample Stage Temperature Control Method | PID temperature control |
| Temperature Control Accuracy | ± 1℃ |
| Plasma Sputtering Source Quantity | 2 inches x 1 target |
| Plasma Sputtering Source Cooling Method | Water cooling |
| Vacuum Chamber Size | Ф 180 × 200 mm |
| Vacuum Chamber Observation Window | Omnidirectional visibility |
| Vacuum Chamber Material | High purity quartz |
| Vacuum Chamber Open Method | Top cover removable |
| Vacuum Chamber Cover Material (Upper And Lower) | 304 SUS |
| Vacuum Chamber Pumping Port | KF25 |
| Vacuum Chamber Intake Port | 1/4 inch ferrule connector |
| Vacuum System Pump Type | Dual-stage rotary vane vacuum pump |
| Vacuum System Pumping Rate | 1.1 L/s (4 m³/h) |
| Vacuum System Ultimate Vacuum Pressure | ≥ 0.1 Pa |
| Vacuum System Vacuum Measurement | Resistance vacuum gauge |
| Vacuum System Pumping Port | KF25 |
| Vacuum System Exhaust Interface | KF16 |
| Plasma Sputtering Power Supply | 3000 V, DC |
| Output Power of DC Power Supply | ≤ 150 W |
| Maximum Sputtering Current | 0.05 A |
| Power Supply | AC 220V, 50Hz |
| Total Power | 1.5 kW/ 2kW |
| Dimension | 570 × 450 × 550 mm |
| Weight | 30 kg |
High-purity quartz vacuum chamber
Omnidirectional visibility
PLC control system
Rotatable heating sample stage
Compact size
Easy operation
Plasma Sputtering Coater LPSC-A11 is used for thin-film deposition in applications like SEM sample preparation, metal coating, and optical coatings. It provides uniform coatings with improved adhesion, ideal for research, semiconductor, and materials science experiments.
Labtron Equipment Ltd., Quatro House, Lyon Way, Camberley, Surrey GU16 7ER United Kingdom
Email: info@labtron.com Whatsapp: +44 73 4441 2688 Phone: +44 2080 043608
info@labtron.com
